|675||Introduction to Nano and Microfabrication, 4 hr., 4 cr.|
|Prereq:||Graduate standing and permission of department|
This hands-on course will introduce the students to the basic techniques and concepts related to nano and microfabrication.
The course will discuss topics such as lithography, chemical vapor deposition, dry and wet etching of semiconductors, growth of semiconductor nanostructures and structural and optical characterization. The students will gain in-depth understanding of the techniques and obtain hands-on training on the various tools needed for nano and microfabrication.